Press Release · 2009
Delft, December 14, 2009
MAPPER appoints Jan Peter Schmittmann in Supervisory Board
Delft, The Netherlands
Delft, The Netherlands, December 14, 2009 - MAPPER Lithography (maskless lithography machines for the semiconductor industry) has appointed Jan Peter Schmittmann (1956) as a member of the Supervisory Board. Within the Supervisory Board he will take up the special responsibility for the process that should guide the company into its next phase for the coming years, entailing a partnership with a well established global semiconductor equipment player.
Jan Peter Schmittmann was previously employed at ABN AMRO. He graduated from the University of Amsterdam (Economics) in 1983. During his career within ABN AMRO he has worked at various departments of the Bank. Prior to his departure in 2008 he was CEO of the Dutch activities of ABN AMRO. Jan Peter Schmittmann is married, and has two children.
Jan Peter Schmittmann comments: “The coming years will be very exciting for MAPPER. If the company continues to reach the milestones agreed with its customers MAPPER will have to enter into partnerships within the industry in order to be able to roll out its innovative machines to mass production. Together with shareholders and management we will explore all opportunities to come to the best approach. I am looking forward to support the company in this process.“
As from early 2008 MAPPER’s Supervisory Board comprises of Jan Lobbezoo, Arthur del Prado and Paul Schröder.
Chairman Lobbezoo (1946) was a financial executive at Royal Philips Electronics until early 2007. Until 2005, he served as CFO of Philips Semiconductors (currently NXP Semiconductors). Lobbezoo has also served on the Board of Directors of leading global chip manufacturer Taiwan Semiconductor Manufacturing Company (TSMC) for over 12 years.
Arthur del Prado (1931) was founder of both ASM Lithography as well as ASM International. He was President and CEO of ASMI until 2007. In addition, he has served on the supervisory boards of listed Dutch companies such as Océ van der Grinten, GTI Holding, Delft Instruments and Breevast.
Paul Schröder (1954) is currently CEO of Capital C Ventures. Prior to that he was chief executive officer of Residex, one of the oldest venture capital firms in the Netherlands. He also serves on the supervisory boards of P3 Technology Partners, Life Science Partners, SNT Holding and Nedgraphics Holding, among other companies.
For more information, please contact:
MAPPER Lithography
Christopher Hegarty, CEO, or Jaap Bastiaansen, CFO
Telephone: +31 (0) 15 – 8880250
www.mapperlithography.com
About MAPPER Lithography
MAPPER focuses on developing lithography machines for the semiconductor industry. These machines utilise new and innovative technology that makes it possible to profitably manufacture the chips of the future. The MAPPER machine is a highly cost-effective way of manufacturing the next generation of chips, eliminating the need for the highly expensive mask required for standard machines while at the same time combining high resolution and high productivity. Current lithography machines utilize photographic techniques to etch infinitesimal electric switches – which have a surface area of less than 1/100th of a human hair - onto a silicon wafer. These standard machines contain a mask that holds the blueprint of the chip, the pattern of which is applied to a photosensitive layer (similar to a photograph being exposed). The MAPPER machine images wafers directly using parallel electron beams, without the use of a mask.
MAPPER is located in Delft, near Delft University of Technology, which is one of its shareholders. The company employs 170 people. In addition to Delft University of Technology, MAPPER“s shareholders include a number of professional investors: ING subsidiary Parcom/Capital-C Ventures, KT Venture Group, Quest for Growth and KBC Private Equity, as well as private investors of which Mr A. del Prado.
Delft, 21 September 2009
MAPPER Lithography awarded subsidy by SenterNovem
Delft, The Netherlands
MAPPER Lithography - manufacturer of innovative lithography machines for the semiconductor industry - announces that it has been awarded a subsidy of around EUR 10 million by SenterNovem, the innovation agency of the Ministry of Economic Affairs. The subsidy is provided as part of the High Tech Top Projects scheme. MAPPER and its partners will use these funds to develop the beta tool, which will demonstrate that the MAPPER lithography machines are suitable for chip production in higher volumes.
MAPPER Lithography will develop the beta tool with Catena, Technolution, Multin Hittech, Demcon and Delft University of Technology, which are not just suppliers but also shareholders in the company. Each of these businesses provides its own unique contribution to the development of the tool in the fields of MEMS, high speed data processing, optical data transmission, optics, mechatronics and motion control. In addition, MAPPER works with numerous related businesses. With the subsidy, the Netherlands will reinforce its leading position in ebeam lithography compared to competitors such as Japan.
Jaap Bastiaansen, Chief Financial Officer (CFO) of MAPPER Lithography, comments: “We are very pleased with the award of this subsidy. It will enable us to, in addition to constructing machines, continue to undertake the research activities required for the optimisation of the next generation of our machines in line with our roadmap. We carry out these activities in association with the best technology companies in the Netherlands. Also the fact that leading parties including TSMC and Leti are currently testing our first machines attests to the growing confidence of the market in our innovative maskless lithography technology.“
Under the High Tech Top Projects scheme, the Ministry of Economic Affairs is providing subsidies totalling EUR 100 million for five strategic R&D projects. The development of the beta tool by MAPPER is one of those projects. Subsidies have also been granted to projects by ASML, NXP, Philips and Océ.
By supporting High Tech Top Projects, Minister Maria van der Hoeven of Economic Affairs aims to help companies in high tech industries to continue to invest in their future via strategic R&D projects despite the crisis. The objective is to further strengthen the internationally leading position of the Netherlands in these fields, to ensure the Dutch economy is strongly positioned for the future.
The technology of MAPPER
MAPPER develops lithography machines for the semiconductor industry. These machines utilise new and innovative technology enabling the chips of the future to be produced cost-effectively. Via maskless electron lithography, over 10,000 parallel electron beams are used to write patterns of electrical circuits directly on to wafers, eliminating the expensive photo masks used in current lithography machines.
Current lithography machines use photographic techniques to create extremely small electrical circuits, with a surface area of less than 1/100th of a human hair, on silicon wafers. They use a very expensive mask that contains the blueprint of the chip to transfer this pattern on to a photosensitive layer (comparable to a photograph being exposed on film).
MAPPER’s technology unlocks a highly cost-effective way of producing next-generation chips by making the expensive masks redundant and combining high resolution and high productivity.
About MAPPER Lithography
MAPPER is established in Delft, near Delft University of Technology, which is one of its shareholders. MAPPER has 170 employees, a mix of young academics holding graduate degrees or doctorates and experienced managers, and works with a number of qualified subcontractors. In addition to Delft University of Technology, other investors in MAPPER comprise professional investors, such as Capital-C Ventures (a subsidiary of Parcom), KT Venture Group, Quest for Growth and KBC Private Equity, and private investors in high-tech, including Mr del Prado, founder of ASM International.
For more information:
MAPPER Lithography:
Jaap Bastiaansen, CFO - Tel + 31 15 888 0250
GRENOBLE, France, and DELFT, The Netherlands July 21, 2009
CEA-Leti and MAPPER to Launch “IMAGINE“ Program with Delivery Of MAPPER’s Massively Parallel Electron Beam Platform
GRENOBLE, France, and DELFT, The Netherlands
CEA-Leti and MAPPER Lithography announce today that MAPPER has delivered one of its massively parallel electron beam platforms to CEA-Leti.
This delivery is part of the collaboration program between MAPPER and CEA-Leti targeting development of maskless lithography for IC manufacturing for 22nm and beyond. The 300mm, 110-beam platform will be upgraded over the coming two years to reach industrial maturity. The MAPPER platform is the core technology on which the three-year IMAGINE program is built. This program provides the world’s major chip manufacturers with the opportunity to assess the maskless lithography technology in a real manufacturing environment. In addition, this program will develop and qualify the complete infrastructure from data preparation to process integration, in preparation for its industrial introduction.
“July 2009 is an important month in MAPPER’s history, since we will be shipping our first two machines“, said Christopher Hegarty, MAPPER’s CEO. “Given CEA-Leti’s extensive expertise in e-beam lithography, we are delighted that one of our machines is installed at their fab in line with our roadmap. We are looking forward to working with industry partners to get this technology to a manufacturing level.“
Olivier Demolliens, head of Nanotec at CEA-Leti said, “This is a very important step as it is the first attempt to install such equipment in an industrial environment, and we are very excited to do it at CEA-Leti. By sharing developments with our partners, we are on the way to establishing the potential of the multibeam technology and to offer new promising perspectives to the semiconductor industry.“
About CEA-LETI
CEA is a French Research and Technology Organisation, with activities in three main areas: Energy, Technologies for Information and Healthcare, and Defence and Security. Within CEA, the Laboratory for Electronics & Information Technology (CEA-Leti) works with companies in order to increase their competitiveness through technological innovation and transfers. Leti is focused on micro and nanotechnologies and their applications, from wireless devices and systems, to biology and healthcare or photonics. Nanoelectronics and Microsystems (MEMS) are at the core of its activities. As a major player in MINATEC excellence centre, Leti operates 8,000 m² state-of-the-art clean rooms, on 24/7 mode, on 200 mm and 300 mm wafer standards. With 1,200 employees, Leti trains more than 150 Ph.D. students and hosts 200 assignees from partner companies. Strongly committed to the creation of value for the industry, Leti puts a strong emphasis on Intellectual Property and owns more than 1,400 patent families. In 2008, contractual income covered more than 75% of its budget worth 205 M€. For more information, visit www.leti.fr.
About MAPPER Lithography
MAPPER’s offices are located in Delft, The Netherlands, near Delft University of Technology, one of the company’s shareholders. MAPPER has a headcount of 170 people. Shareholders of MAPPER also include professional investors - Capital-C Ventures, KT Venture Group, Hoving and Partners, Quest for Growth and KBC Private Equity - and private investors.
MAPPER’s technology
MAPPER develops lithography machines for the chip industry. These machines utilize a new and innovative technology with which the chips of the future can be made cost effectively. MAPPER’s machine provides a highly cost-effective way of making the next generation of chips because it makes the mask redundant and combines high resolution and high productivity. Current lithography machines use photographic techniques to create minute electrical circuits smaller than 1/100th of a human hair on a silicon wafer. They use a mask which contains the blueprint of the chip and transfer this pattern on to a photosensitive layer (comparable to a photograph being exposed on film).
MAPPER Contact
Bert Jan Kampherbeek
Tel: +31 15888 0250
Email: bert.jan.kampherbeek@mapperlithography.com
CEA-Leti Contacts
Serge Tedesco
Tel: +33 4 38 78 49 89
Email: serge.tedesco@cea.fr
Clément Moulet
Tel: +33 4 38 78 03 26
Email: clement.moulet@cea.fr
Hsinchu, Taiwan and Grenoble, France, July 6, 2009
TSMC Joins the CEA-Leti Program on Multiple E-Beam Lithography for IC Manufacturing
Hsinchu (Taiwan) and Grenoble (France)
TSMC (TWSE: 2330, NYSE: TSM) and CEA-Leti, the leading French semiconductor research institute, signed an agreement today in which TSMC will join the new industrial program IMAGINE, led by CEA-Leti, on maskless lithography for IC manufacturing. Intended to operate for three years, this program allows companies to assess a maskless lithography infrastructure for IC manufacturing and use MAPPER Technology as a solution towards high throughput. It covers a global approach, including tool assessment, patterning and process integration, data handling, prototyping and cost analysis.
“TSMC is always pushing for cost-effective lithography and the development of maskless lithography is one of the potential solutions. We have already announced the joint steps with MAPPER to explore multiple e-beam lithography for IC manufacturing at 22 nanometer node and beyond,“ said TSMC’s VP of R&D, Jack Sun. “By joining the IMAGINE program at CEA-Leti, we intend to federate the semiconductor industry around this technology and accelerate its development and introduction for IC manufacturing.“
“Lithography is a major challenge for the industry. A maskless approach can offer flexibility and gain in cost of ownership. Together with MAPPER, we see a route towards industrial throughput,“ said Leti’s CEO, Laurent Malier.“ Having TSMC on board the IMAGINE program is pivotal and will strengthen the assessment towards manufacturing. It shows the commitment in the technology from the industry and will take maskless lithography to the next step in the development that is required to make it a viable solution for 22-nm manufacturing.“
The IMAGINE program will cover a range of topics, including tool assessment, patterning and process integration, data handling and cost of ownership studies. CEA-Leti and MAPPER are currently in the process of selecting semiconductor companies to join the program.
About TSMC
TSMC is the world’s largest dedicated semiconductor foundry, providing the industry’s leading process technology and the foundry’s largest portfolio of process-proven libraries, IP, design tools and reference flows. The Company’s total managed capacity in 2008 exceeded 9 million 8-inch equivalent wafers, including capacity from two advanced 12-inch - GIGAFABs ™, four eight-inch fabs, one six-inch fab, as well as TSMC’s wholly owned subsidiaries, WaferTech and TSMC (China), and its joint venture fab, SSMC. TSMC is the first foundry to provide 40nm production capabilities. Its corporate headquarters are in Hsinchu, Taiwan. For more information about TSMC please visit www.tsmc.com.
About CEA-LETI
CEA is a French Research and Technology Organisation, with activities in three main areas: Energy, Technologies for Information and Healthcare, and Defence and Security. Within CEA, the Laboratory for Electronics & Information Technology (CEA-Leti) works with companies in order to increase their competitiveness through technological innovation and transfers. Leti is focused on micro and nanotechnologies and their applications, from wireless devices and systems, to biology and healthcare or photonics. Nanoelectronics and Microsystems (MEMS) are at the core of its activities. As a major player in MINATEC excellence centre, Leti operates 8,000 m² state-of-the-art clean rooms, on 24/7 mode, on 200 mm and 300 mm wafer standards. With 1,200 employees, Leti trains more than 150 Ph.D. students and hosts 200 assignees from partner companies. Strongly committed to the creation of value for the industry, Leti puts a strong emphasis on Intellectual Property and owns more than 1,400 patent families. In 2008, contractual income covered more than 75% of its budget worth 205 M€. For more information, visit www.leti.fr.
TSMC Spokesperson
Lora Ho
Vice President & Chief Financial Officer & Spokesperson
Tel: 886-3-5664602
TSMC Deputy Spokesperson
J.H. Tzeng
Deputy Director, PR Department
Tel: 886-3-5055028
Fax: 886-3-5670121
Mobile: 886-928-882-607
Email: jhtzeng@tsmc.com
For further information, please contact
Richard Chung
Technical Manager
Tel: 886-3-563-6688 ext. 712-5038
Fax: 886-3-5670121
Mobile: 886-911-258-751
Email: cychung@tsmc.com