Press Release - MAPPER

Press Release · 2008

MAPPER and CEA-Leti launch an international program on Maskless Lithography for 22nm IC manufacturing and install a MAPPER platform within CEA-Leti premises
December 12, 2008
SenterNovem provides EUR 5 million innovation loan to MAPPER
November 27, 2008
MAPPER and TSMC Take Next Step in Exploring Multiple E-beam Lithography for IC Manufacturing at 22 nanometer node and Beyond.
October 13, 2008
MAPPER Lithography appoints Christopher Hegarty as CEO
October 10, 2008
MAPPER receives millions in subsidy from EU
February 27, 2008
Mapper Lithography appoints Jaap Bastiaansen as CFO
January 16, 2008








































Delft (The Netherlands), Grenoble (France), December 12, 2008


MAPPER and CEA-Leti launch an international program on Maskless Lithography for 22nm IC manufacturing and install a MAPPER platform within CEA-Leti premises

Delft (The Netherlands) / Grenoble (France)

MAPPER Lithography and CEA-Leti, a leading French semiconductor research institution, signed an agreement today according to which MAPPER will ship a 300 mm electron-beam direct write lithography platform to CEA-Leti in Grenoble. The machine will be used for a new industrial program called IMAGINE in which IC companies will assess MAPPER’s technology to develop maskless lithography for IC manufacturing.

“This is a great opportunity for MAPPER“, said MAPPER’s CEO, Dr. Christopher Hegarty. “By shipping this machine to CEA-Leti and executing an industry-wide development program in the coming three years, MAPPER will have the opportunity to verify the applicability of our technology with a number of different companies. CEA-Leti’s expertise in electron beam technology makes them the ideal partner for us to integrate our technology into the production infrastructure and make it production ready. This allows companies involved in resist and data processing technologies to develop the infrastructure required to be ready for 22 nm.“

Taking maskless lithography to the next step Dr. Laurent Mallier, CEO of CEA-Leti states: “CEA-Leti’s extensive experience in electron beam technology for IC manufacturing and MAPPER’s technology are a perfect fit to host an international program at CEA-Leti. We have been working very successfully with MAPPER in the European MAGIC program. Having this machine at our site will enable us to take maskless lithography to the next step in the development that is required to make it a viable solution for 22 nm manufacturing.“

The IMAGINE program will cover a range of topics, including tool assessment, patterning and process integration, data handling and cost of ownership studies. CEA-Leti and MAPPER are currently in the process of selecting semiconductor companies to join the program.

MAPPER’s technology

MAPPER develops lithography machines for the chip industry. These machines utilize a new and innovative technology with which the chips of the future can be made cost effectively. MAPPER’s machine provides a highly cost-effective way of making the next generation of chips because it makes the mask redundant and combines high resolution and high productivity. Current lithography machines use photographic techniques to create minute electrical circuits smaller than 1/100th of a human hair on a silicon wafer. They use a mask which contains the blueprint of the chip and transfer this pattern on to a photosensitive layer (comparable to a photograph being exposed on film).

Press contact:
MAPPER Lithography
Bert Jan Kampherbeek, Vice President Market Development or
Jaap Bastiaansen, CFO
Tel + 31 15 888 0250

CEA-LETI
Clément Moulet, Press Officer
Tel +334.38.78.03.26
clement.moulet@cea.fr

About MAPPER Lithography

MAPPER is located in Delft, near Delft University of Technology, which is one of its shareholders. The company employs 170 people, a mix of young, eager graduates and PhDs and experienced managers, and is working with a number of highly qualified professionals contractors. In addition to Delft University of Technology, MAPPER’s shareholders include a number of professional investors: Capital-C Ventures (subsidiary of Parcom), KBC Private Equity, Quest for Growth and KT Venture Group, as well as private investors in high technology such as Mr. del Prado, founder of ASM International. Moreover, MAPPER has access to subsidies granted by a variety of institutions.

About CEA-LETI:

Located in Grenoble, Leti (Electronics and Information Technology Laboratory of the French Atomic Energy Commission) is one of the main European applied research centers in electronics. More than 85% of its activity is devoted to research with 350 contracts a year. Since its creation in 1967, Leti has led to the creation of more than 30 start-ups in high-technology. The main areas of activity are micro- and nano-technologies for microelectronics (more Moore, More than Moore and Beyond CMOS), technologies, design and integration of microsystems, photonics and imaging technologies, micro- and nano-technologies for biology and health, communication technologies and nomadic objects. Leti operates with an annual budget of 174 M€ and employs 1,000 people with, in addition, more than 600 external collaborators (postgraduates, research and corporate partners). Leti has 8,000m² of clean rooms, an equipment portfolio worth 200 M€ and invests more than 40 M€ a year on new equipment. Leti has a dynamic Intellectual Property policy and has filed more than 200 new patent applications in 2007. Instigator of the MINATEC® pole of innovation, CEA Leti is also one of its principal partners, beside the Grenoble INP (Grenoble Institute of Technology) and the local authorities.

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Delft, November 27, 2008


SenterNovem provides EUR 5 million innovation loan to MAPPER

Delft, The Netherlands

– MAPPER Lithography has received a EUR 5 million innovation loan from SenterNovem – the innovation agency of the Dutch Ministry of Economic Affairs – to further develop its highly innovative lithography machine for the manufacturing of chips.

MAPPER previously announced a technological breakthrough in 2007 when the company demonstrated that through the use of parallel electron beams, electronic circuits can be imaged directly onto the chip, thereby eliminating expensive masks required to project the image of the switches in conventional lithography machines. According to TSMC, the world’s leading semiconductor contract manufacturer, who recently acquired MAPPER’s first machine, MAPPER’s solution is a serious candidate to become the future lithography standard, because it holds great promise for cost-effective manufacturing at 22nm and beyond.

MAPPER’s CFO Jaap Bastiaansen comments that “MAPPER regards the loan as a recognition of the innovative power and international commercial potential of maskless lithography machines. Next to this MAPPER’s innovative technology will further enhance the strong reputation Dutch lithography companies enjoy throughout the world. At MAPPER, we feel it is important that we can continue to rely on SenterNovem’s support in the coming years.”

The innovation loan allows MAPPER to accelerate its continued development of prototypes. The machines will be ready for chip manufacturing at the 22nm node, so as to be able to meet the rapidly growing demand for increasingly small, increasingly powerful and increasingly inexpensive chips.

About MAPPER Lithography

Established in 2001, MAPPER focuses on developing lithography machines for the semiconductor industry. These machines utilise new and innovative technology that makes it possible to profitably manufacture the chips of the future. The MAPPER machine is a highly cost-effective way of manufacturing the next generation of chips, eliminating the need for the highly expensive mask required for standard machines while at the same time combining high resolution and high productivity. The current generation of lithography machines utilises photographic techniques to etch infinitesimal electric switches – which have a surface area of less than 1/100th of a human hair – onto a silicon wafer. These standard machines contain a mask that holds the blueprint of the chip, the pattern of which is applied to a photosensitive layer (similar to a photograph being illuminated). The MAPPER machine images wafers directly using parallel electron beams, without the use of a mask.

MAPPER is located in Delft, near Delft University of Technology, which is one of its shareholders. The company employs 160 people, a mix of young, eager graduates and PhDs and experienced managers, as well as collaborating with a number of highly qualified professionals working on short-term employment contracts. In addition to Delft University of Technology, MAPPER’s shareholders include a number of professional investors: Parcom subsidiary Capital-C Ventures, KBC Private Equity, Quest for Growth and KT Venture Group, as well as private venture capitalists such as former ASM International CEO Arthur H. del Prado.

About SenterNovem

SenterNovem, for innovation and sustainability
SenterNovem strives to achieve a strong innovative business community in a safe and supportive, sustainable society and promotes sustainable economic growth by building a bridge between the market and government, at both national and international levels. SenterNovem provides companies, (knowledge) institutions and government authorities with advice, knowledge and financial support. It brings parties together who have a passion for a sustainable and innovative society. SenterNovem is an agency of the Dutch Ministry of Economic Affairs and implements national government policy in a professional, effective and inspiring way by order of the State government.

The Innovation Loan is a venture capital loan for the funding of new development projects that have high commercial potential but still involve significant technological risk. The projects are aimed at the development of new products, processes or services. The Innovation Loan reduces financial risk for the recipient business in that there is no need to repay the loan in the event that the project fails. The assessment criteria include the quality and feasibility of the plans, and the quality, management and financial position of the business. For more information, please visit www.senternovem.nl/innovatiekrediet.

For information:

For more information, please contact:
Jaap Bastiaansen, CFO or
Bert Jan Kampherbeek, Vice President, Market Development
Telephone number: +31 (15) 8880250

Léon Melens, Smink, Van der Ploeg & Jongsma
Financial Communications, Amstelveen, the Netherlands: +31 (0) 20 6478181

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Delft, The Netherlands / Hsinchu, Taiwan, October 13, 2008


MAPPER and TSMC Take Next Step in Exploring Multiple E-beam Lithography for IC Manufacturing at 22 nanometer node and Beyond.

Delft, The Netherlands / Hsinchu, Taiwan

MAPPER Lithography and Taiwan Semiconductor Manufacturing Company (TSMC) signed an agreement, according to which MAPPER will ship its first 300 mm multiple-electron-beam maskless lithography platform for process development and device prototyping to TSMC. This platform gives TSMC the opportunity to take the next step forward in exploring multiple e-beam technology as a lithography option at 22 nanometer and more advanced process nodes.

Multiple e-beam maskless lithography uses over 10,000 electron beams working in parallel to directly write circuit patterns on a wafer, eliminating the need for the costly photomasks used in current lithography machines.

“This is another huge step forward for MAPPER”, said MAPPER’s CEO, Dr. Christopher Hegarty. “We first demonstrated proof of principle of our massively parallel electron-beam maskless lithography technology concept in September 2007. In the near future we will be shipping our first 300 millimeter platform. We are very proud of this achievement. Having TSMC, the leading semiconductor foundry, as our launching customer for this project is a great honour for us. Their order also is a clear demonstration of TSMC’s expectation of our solution. Our whole team is fully committed to turning this opportunity for 22 nm manufacturing into a mature technology.”

Dr. Jack Sun, Vice President of Research and Development of TSMC said: “MAPPER’s technology holds great promise for cost-effective manufacturing at 22nm and beyond. We are therefore going to test MAPPER’s solution to see whether it will live up to its promise. Using this first tool we will be able to explore its viability for manufacturing. MAPPER’s solution is a serious candidate to become the future lithography standard.”

MAPPER’s technology

MAPPER develops lithography machines for the chip industry. These machines utilize a new and innovative technology with which the chips of the future can be made cost effectively. MAPPER’s machine provides a highly cost-effective way of making the next generation of chips because it significantly reduces costs by eliminating the photomask while simultaneously providing the ultimate in resolution and high productivity. MAPPER’s technology makes use of massively parallel electron beams (up to 13,000 beams in a full production system), thereby coupling the very high resolution and depth of field of electron beam with the promise of high throughput. Current lithography machines use photographic techniques to create minute electrical circuits smaller than 1/100th of a human hair on a silicon wafer. They use a mask which contains the blueprint of the chip and transfer this pattern on to a photosensitive layer (comparable to a photograph being exposed on film), however the photographic techniques have cost and resolution limitations for future generations of semiconductors.

About MAPPER Lithography

MAPPER’s offices are located in Delft, The Netherlands, near Delft University of Technology, one of the shareholders. MAPPER has a headcount of 160 people.
Shareholders of MAPPER are besides Delft University of Technology professional investors – Capital-C Ventures, KT Venture Group, Quest for Growth and KBC Private Equity – and private investors.

About TSMC

TSMC is the world’s largest dedicated semiconductor foundry, providing the industry’s leading process technology and the foundry’s largest portfolio of process-proven libraries, IP, design tools and reference flows. The Company’s total managed capacity in 2008 is to exceed nine million (8-inch equivalent) wafers, including capacity from two advanced 12-inch Gigafabs, four eight-inch fabs, one six-inch fab, as well as TSMC’s wholly owned subsidiaries, WaferTech and TSMC (Shanghai), and its joint venture fab, SSMC. TSMC is the first foundry to provide 40nm production capabilities. Its corporate headquarters are in Hsinchu, Taiwan. For more information about TSMC please see http://www.tsmc.com

For information:

MAPPER Lithography

Bert Jan Kampherbeek, Vice President Market Development
Tel + 31 15 888 0250

Jaap Bastiaansen, CFO
Tel + 31 15 888 0250

TSMC

TSMC Acting Spokesman
J.H. Tzeng, Deputy Director, Public Relations
+886 3 505 5028

Michael Kramer, Senior Administrator, Public Relations
+886 3 505 6216

Index


Delft, October 10, 2008


MAPPER Lithography appoints Christopher Hegarty as CEO

  • Appointment of Supervisory Board
  • Establishment of Technical Advisory Board

Delft, The Netherlands

MAPPER Lithography – a developer of maskless lithography machines for the semiconductor industry – has appointed Christopher Hegarty, a 45-year-old native of Australia, as its new CEO. Hegarty was previously employed at Infineon Technologies, one of the largest semiconductor manufacturers in the world. At Infineon, he became responsible for the Microcontroller business unit in 2003. Prior to that, he worked as a consultant for McKinsey & Company, where he advised clients based in the United States, Asia and Europe on semiconductor technology. Christopher Hegarty earned his PhD in Electrical Engineering from the University of California at Berkeley. He will succeed Boudewijn Baud, who served as MAPPER’s CEO for six years.

Christopher Hegarty: “I am delighted to have the opportunity to lead MAPPER into its next phase. I would also like to thank Boudewijn Baud for his commitment to the company and the valuable contributions he has made to MAPPER’s development during the first crucial period of its existence”.

The MAPPER management team is further comprised of:

Jaap Bastiaansen (b. 1965), CFO; Guido de Boer (b. 1969), Vice President, Engineering; Marco Wieland (b. 1975, co-founder of MAPPER), Vice President, Strategy and Technology; and Bert Jan Kampherbeek (b. 1976, co-founder of MAPPER), Vice President, Marketing & Sales.

Breakthrough

In 2007, MAPPER made an important breakthrough in lithography technology by demonstrating that vital wafers used in chip manufacturing could also be imaged using parallel electron beams. This process eliminates the need for expensive masks, which lowers manufacturing costs for chips and significantly reduces the time to market. The technology is based on two innovations: the use of light, which makes it possible to control the electron beams separately, and the use of MEMS lens arrays to focus the parallel electron beams accurately.

Establishment of Supervisory Board and Technical Advisory Board

In 2008, a Supervisory Board and a Technical Advisory Board were established at MAPPER. The Technical Advisory Board advises and assists the Board of Directors and the Supervisory Board in managing and developing the innovative lithography machines.

Supervisory Board

The Supervisory Board is comprised of Jan Lobbezoo, Arthur del Prado and Paul Schröder. Chairman Lobbezoo (b. 1946) was a financial executive at Koninklijke Philips Electronics until early 2007. Until 2005, he served as CFO of Philips Semiconductors (currently NXP Semiconductors). Lobbezoo has also served on the Board of Directors of leading global chip manufacturer Taiwan Semiconductor Manufacturing Company (TSMC) for over 12 years.

Arthur del Prado (b. 1931), founder of ASM International in 1968. He was President and CEO of this company until 2007. In addition, he has served on the supervisory boards of listed Dutch companies such as Océ van der Grinten, GTI Holding, Delft Instruments and Breevast.

Paul Schröder (b. 1954) is currently CEO of Capital C Ventures. Prior to that he was chief executive officer of Residex, one of the oldest venture capital firms in the Netherlands. Schröder’s expertise focuses on investment strategies related to agritech, ICT and life science.
He also serves on the supervisory boards of P3 Technology Partners, Life Science Partners, SNT Holding and Nedgraphics Holding, among other companies.

Technical Advisory Board

The Technical Advisory Board is comprised of:
– Ernst Granneman, Executive Scientist at ASM International.
– Maarten Buijs, a Director at FEI R&D in Eindhoven, the Netherlands,
  responsible for the SEM/SDB product group.
– Neil Richardson, Senior Director at KLA Tencor.
– Kurt Ronse, Director of the Advanced Lithography Program at lithography group IMEC.

To view the complete CVs of CEO Christopher Hegarty, the management team and the members of the Supervisory Board and Technical Advisory Board, please visit the Investors and Technology section on MAPPER’s website: http://www.MAPPERlithography.com.

For more information, please contact:

Jaap Bastiaansen, CFO, or Bert Jan Kampherbeek, Vice President, Market Development
Telephone: +31 (0) 15 - 8880250

Smink, Van der Ploeg & Jongsma
Financial Communications, Amstelveen, the Netherlands: +31 (0) 20 6478181

About MAPPER Lithography

MAPPER focuses on developing lithography machines for the semiconductor industry. These machines utilise new and innovative technology that makes it possible to profitably manufacture the chips of the future. The MAPPER machine is a highly cost-effective way of manufacturing the next generation of chips, eliminating the need for the highly expensive mask required for standard machines while at the same time combining high resolution and high productivity. Current lithography machines utilise photographic techniques to etch infinitesimal electric switches – which have a surface area of less than 1/100th of a human hair – onto a silicon wafer. These standard machines contain a mask that holds the blueprint of the chip, the pattern of which is applied to a photosensitive layer (similar to a photograph being exposed). The MAPPER machine images wafers directly using parallel electron beams, without the use of a mask.

MAPPER is located in Delft, near Delft University of Technology, which is one of its shareholders. The company employs 160 people, a mix of young, eager graduates and PhDs and experienced managers, and collaborates with a number of highly qualified professionals working on short–term employment contracts. In addition to Delft University of Technology, MAPPER’s shareholders include a number of professional investors: Capital–C Ventures, KT Venture Group, Quest for Growth and KBC Private Equity, as well as private investors.

Index


Delft, February 27, 2008


MAPPER receives millions in subsidy from EU

Delft, The Netherlands

MAPPER Lithography has received a subsidy of approximately € 3.5 million from the European Union to enable the further development of its innovative lithography machine for producing next generation chips. The company recently achieved an important breakthrough in the field of lithography by demonstrating that the wafers that are crucial for the production of chips can also be imaged using parallel electron beams. This eliminates the need to use expensive masks, which substantially reduces the manufacturing costs of chips and shortens the time to market.

The EU subsidy is being granted within the framework of the new European programme called MAGIC, which stands for Maskless lithography for IC manufacturing. This was announced today at the SPIE Advanced Lithography congress being held in San Jose, California. The total budget for the MAGIC project is approximately € 12 million. In addition to MAPPER, other large European IC manufacturers including ST Microelectronics and Qimonda are also participating in the project.

The prototype of the MAPPER lithography machine is able to write the patterns for the 32 nanometre chip generation in the resist using parallel electron beams. The machine is based on two technological breakthroughs: the use of light to direct the electron beams individually and the use of MEMS lens arrays to focus the parallel electron beams accurately. During the next phase of this machine’s development, MAPPER will focus on applying the technology on a wafer that is 300 mm in diameter. In order to accomplish this, the team will be expanded to include approximately 60 staff members in 2008.

About MAPPER Lithography

MAPPER develops lithography machines for the semiconductor industry. These machines utilise new and innovative technology that makes it possible to profitably manufacture the chips of the future. MAPPER was founded in 2001 and is located in Delft, the Netherlands. The company currently has 120 highly educated employees and works with a number of professionals working on short-term employment contracts. The shareholders are the Delft University of Technology and various professional investors, including Parcom subsidiary Capital-C Ventures, KBC Private Equity, Quest for Growth and KT Venture Group, and private shareholders including Mr Arthur del Prado of ASM International.

For more information, please contact:

Jaap Bastiaansen, CFO or
Bert Jan Kampherbeek, Vice President Market Development

Telephone 015 - 8880250

Index


Delft, January 16, 2008


Mapper Lithography appoints Jaap Bastiaansen as CFO

Delft, The Netherlands

Jaap Bastiaansen (1965) has been appointed CFO and member of the management team of MAPPER Lithography effective 1 February 2008. MAPPER Lithography is located in Delft, the Netherlands and focuses on developing the next generation of lithography machines for the semiconductor market. Bastiaansen will succeed Harry Vreedenburgh (1951) in this position who has decided to concentrate on other ventures and supervisory directorships. Bastiaansen began his career at MeesPierson and moved to Deutsche Bank in 1995 where he focused primarily on investment and commercial banking aimed at the technology market. He transferred to Philips in 2001 and later to NXP Semiconductors where he held various financial controller positions.

About MAPPER Lithography

MAPPER was established in 2001 and is located in Delft, the Netherlands. It is a fast-growing and innovative company that has more than 100 well-educated employees and works with a large number of qualified employees on short-term contracts. In addition to having Delft University of Technology as a shareholder, MAPPER’s shareholders encompass both professional investors, namely Parcom subsidiary Capital-C Ventures, KBC Private Equity, Quest for Growth and KT Venture Group, and private investors including Mr Arthur del Prado of ASM International.

MAPPER Lithography
015 88 80 250
www.mapperlithography.com

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