Mentor Graphics is fifth industrial partner in CEA-Leti’s IMAGINE program on maskless lithography
- Created on Tuesday, 15 March 2011 14:59
Grenoble, France, March 15, 2011
Mentor will develop multi e-Beam lithography data processing for 3-year project
CEA-Leti announced that Mentor Graphics is the fifth industrial partner to join the IMAGINE program designed to develop maskless lithography for IC manufacturing.
Launched by CEA-Leti and MAPPER Lithography, the three-year, multiple e-beam-lithography partnership is evaluating a maskless lithography (ML2) infrastructure and studying the use of MAPPER tools for high throughput. It covers a global approach to the technology, including tool assessment, patterning and process integration, data handling, prototyping and cost analysis.
Mentor will develop multiple e-beam lithography data processing for the program.
“Multi-beam systems for maskless lithography are contenders for next-generation patterning. The IMAGINE program is offering a unique infrastructure to enable this technology and we want to be an early partner in this research,” said Joseph Sawicki, vice president and general manager of Mentor’s Design to Silicon Division.“Our broad technology base and experience as the leader in optical proximity correction (OPC) and mask process correction (MPC) will provide technical components needed to make sure the data-path technology is ready for production deployment.”
“Data handling and proximity effect correction are key elements to the success of maskless technology,” said Serge Tedesco, CEA-Leti program manager. “Having Mentor Graphics, the worldwide leader in mask data processing, will accelerate the IMAGINE program’s progress toward the introduction of maskless lithography in manufacturing.”
Other partners include TSMC, STMicroelectronics, SOKUDO and TOK. MAPPER, which makes maskless-lithography machines for the semiconductor industry, is supporting the project with its massively parallel electron-beam platforms.
About Mentor Graphics Corporation
Mentor Graphics Corporation (NASDAQ: MENT) is a world leader in electronic hardware and software design solutions, providing products, consulting services and award-winning support for the world’s most successful electronics and semiconductor companies.
Established in 1981, the company reported revenues over the last 12 months of about $800 million. Corporate headquarters are located at 8005 S.W. Boeckman Road, Wilsonville, Oregon 97070-7777. World Wide Web site: http://www.mentor.com/..
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Serge Tedesco
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